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Nicolas BREIL
Nicolas BREIL
Material Research Scientist / Engineer
Dirección de correo verificada de us.ibm.com
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Low temperature implementation of dopant-segregated band-edge metallic S/D junctions in thin-body SOI p-MOSFETs
G Larrieu, E Dubois, R Valentin, N Breil, F Danneville, G Dambrine, ...
2007 IEEE International Electron Devices Meeting, 147-150, 2007
2782007
Arsenic-segregated rare-earth silicide junctions: reduction of Schottky barrier and integration in metallic n-MOSFETs on SOI
G Larrieu, DA Yarekha, E Dubois, N Breil, O Faynot
IEEE Electron Device Letters 30 (12), 1266-1268, 2009
2662009
High performance 14nm SOI FinFET CMOS technology with 0.0174µm2 embedded DRAM and 15 levels of Cu metallization
CH Lin, B Greene, S Narasimha, J Cai, A Bryant, C Radens, V Narayanan, ...
2014 IEEE International Electron Devices Meeting, 3.8. 1-3.8. 3, 2014
1792014
Challenges of nickel silicidation in CMOS technologies
N Breil, C Lavoie, A Ozcan, F Baumann, N Klymko, K Nummy, B Sun, ...
Microelectronic Engineering 137, 79-87, 2015
472015
Comparative analysis of semiconductor device architectures for 5-nm node and beyond
P Feng, SC Song, G Nallapati, J Zhu, J Bao, V Moroz, M Choi, XW Lin, ...
IEEE Electron Device Letters 38 (12), 1657-1660, 2017
402017
RF small-signal analysis of Schottky-barrier p-MOSFET
R Valentin, E Dubois, JP Raskin, G Larrieu, G Dambrine, TC Lim, N Breil, ...
IEEE transactions on electron devices 55 (5), 1192-1202, 2008
402008
Ultra-low NMOS contact resistivity using a novel plasma-based DSS implant and laser anneal for post 7 nm nodes
CN Ni, KV Rao, F Khaja, S Sharma, S Tang, JJ Chen, KE Hollar, N Breil, ...
2016 IEEE Symposium on VLSI Technology, 1-2, 2016
382016
Contacts in advanced CMOS: History and emerging challenges
C Lavoie, P Adusumilli, AV Carr, JSJ Sweet, AS Ozcan, E Levrau, N Breil, ...
ECS Transactions 77 (5), 59, 2017
352017
FinFET source-drain merged by silicide-based material
BA Anderson, N Breil, C Lavoie
US Patent 9,595,524, 2017
332017
Ti and NiPt/Ti liner silicide contacts for advanced technologies
P Adusumilli, E Alptekin, M Raymond, N Breil, F Chafik, C Lavoie, ...
2016 IEEE Symposium on VLSI Technology, 1-2, 2016
302016
Ultra low p-type SiGe contact resistance FinFETs with Ti silicide liner using cryogenic contact implantation amorphization and solid-phase epitaxial regrowth (SPER)
YR Yang, N Breil, CY Yang, J Hsieh, F Chiang, B Colombeau, BN Guo, ...
2016 IEEE Symposium on VLSI Technology, 1-2, 2016
272016
Optimization of RF performance of metallic source/drain SOI MOSFETs using dopant segregation at the Schottky interface
RË Valentin, E Dubois, G Larrieu, JP Raskin, G Dambrine, N Breil, ...
IEEE electron device letters 30 (11), 1197-1199, 2009
252009
Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures
N Breil, A Carr, T Kuratomi, C Lavoie, IC Chen, M Stolfi, KD Chiu, W Wang, ...
2017 Symposium on VLSI Technology, T216-T217, 2017
232017
An 8-bit 20.7 TOPS/W multi-level cell ReRAM-based compute engine
JM Correll, L Jie, S Song, S Lee, J Zhu, W Tang, L Wormald, J Erhardt, ...
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and …, 2022
222022
Transistor and method of forming same
VS Basker, NL Breil, O Gluschenkov, S Mochizuki, A Reznicek
US Patent 9,911,849, 2018
222018
FinFET source-drain merged by silicide-based material
BA Anderson, N Breil, C Lavoie
US Patent 9,543,167, 2017
192017
Fluorine-free tungsten films as low resistance liners for tungsten fill applications
J Bakke, Y Lei, Y Xu, K Daito, X Fu, G Jian, K Wu, R Hung, R Jakkaraju, ...
2016 IEEE International Interconnect Technology Conference/Advanced …, 2016
162016
Oxide mediated epitaxial nickel disilicide alloy contact formation
E Alptekin, NL Breil, C Lavoie, AS Ozcan, KT Schonenberg
US Patent 9,236,345, 2016
142016
Impact of channel doping on Schottky barrier height and investigation on p-SB MOSFETs performance
G Larrieu, E Dubois, D Yarekha, N Breil, N Reckinger, X Tang, ...
Materials Science and Engineering: B 154, 159-162, 2008
132008
Selective etching of Pt with respect to PtSi using a sacrificial low temperature germanidation process
N Breil, A Halimaoui, T Skotnicki, E Dubois, G Larrieu, A Łaszcz, ...
Applied Physics Letters 91 (23), 2007
132007
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