Fang Liu

Citada per

	Totes	Des de 2016
Citacions	377	174
Índex h	12	7
Índex i10	13	6

20092010201120122013201420152016201720182019202020212 17 35 35 51 26 35 42 41 27 28 22 14

Coautors

Roya MABOUDIANUniversity of California at BerkeleyCorreu electrònic verificat a berkeley.edu
Carlo CarraroUniversity of California at BerkeleyCorreu electrònic verificat a berkeley.edu
Christopher RoperHRL Laboratories, LLCCorreu electrònic verificat a hrl.com
Albert GutesAbbott Diabetes CareCorreu electrònic verificat a abbott.com
Ben HsiaProcess Development Engineer, EnovixCorreu electrònic verificat a berkeley.edu
Hao-Yen TangUC Berkeley, UltraSense SystemsCorreu electrònic verificat a eecs.berkeley.edu
Gabriella LestariUniversity of TorontoCorreu electrònic verificat a mail.utoronto.ca
Igor BargatinAssociate Professor of Mechanical Engineering and Applied Mechanics, University of PennsylvaniaCorreu electrònic verificat a seas.upenn.edu
Jae Hyung LeeStratio, Inc. & Stanford UniversityCorreu electrònic verificat a alumni.stanford.edu

Fang Liu

University of California at Berkeley

Correu electrònic verificat a berkeley.edu

MEMS


Títol Ordena per cites Ordena per any Ordena per títol	Citada per Citada per	Any
Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications F Liu, C Carraro, AP Pisano, R Maboudian Journal of Micromechanics and Microengineering 20 (3), 035011, 2010	50	2010
Graphitization of n-type polycrystalline silicon carbide for on-chip supercapacitor application F Liu, A Gutes, I Laboriante, C Carraro, R Maboudian Applied Physics Letters 99 (11), 112104, 2011	47	2011
Versatile CMOS-MEMS integrated piezoelectric platform JM Tsai, M Daneman, B Boser, D Horsley, M Rais-Zadeh, HY Tang, Y Lu, ... 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015	36	2015
Residual stress characterization of polycrystalline -SiC films on Si(100) deposited from methylsilane F Liu, C Carraro, J Chu, R Maboudian Journal of Applied Physics 106 (1), 013505, 2009	36	2009
Measurement of adhesion forces between polycrystalline silicon surfaces via a MEMS double-clamped beam test structure GH Li, I Laboriante, F Liu, M Shavezipur, B Bush, C Carraro, ... Journal of Micromechanics and Microengineering 20 (9), 095015, 2010	25	2010
Low frequency response microphone diaphragm structures and methods for producing the same F Liu, KL Yang US Patent 8,946,831, 2015	19	2015
Enhanced Ohmic contact via graphitization of polycrystalline silicon carbide F Liu, B Hsia, C Carraro, AP Pisano, R Maboudian Applied Physics Letters 97 (26), 262107, 2010	19	2010
Interfacial adhesion between rough surfaces of polycrystalline silicon and its implications for M/NEMS technology I Laboriante, B Bush, D Lee, F Liu, TJK Liu, C Carraro, R Maboudian Journal of adhesion science and technology 24 (15-16), 2545-2556, 2010	16	2010
Corrosion mechanism and surface passivation strategies of polycrystalline silicon electrodes F Liu, CS Roper, J Chu, C Carraro, R Maboudian Sensors and Actuators A: Physical 166 (2), 201-206, 2011	14	2011
Ex situ vapor phase boron doping of silicon nanowires using BBr3 GS Doerk, G Lestari, F Liu, C Carraro, R Maboudian Nanoscale 2 (7), 1165-1170, 2010	14	2010
Microphone system with mechanically-coupled diaphragms F Liu, KL Yang US Patent 9,143,870, 2015	13	2015
Magnetic micromechanical structures based on CoNi electrodeposited alloys P Cojocaru, L Magagnin, E Gomez, E Vallés, F Liu, C Carraro, ... Journal of Micromechanics and Microengineering 20 (12), 125017, 2010	12	2010
Integrated CMOS back cavity acoustic transducer and the method of producing the same F Liu, MJ Daneman, B Kim, A Minervini US Patent 9,299,671, 2016	11	2016
Low-energy ion bombardment to tailor the interfacial and mechanical properties of polycrystalline -silicon carbide F Liu, CH Li, AP Pisano, C Carraro, R Maboudian Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 28 (5 …, 2010	8	2010
In situ studies of interfacial contact evolution via a two-axis deflecting cantilever microinstrument F Liu, I Laboriante, B Bush, CS Roper, C Carraro, R Maboudian Applied Physics Letters 95 (13), 131902, 2009	8	2009
Microphone with parasitic capacitance cancelation F Liu, KL Yang US Patent 8,755,541, 2014	7	2014
Morphological, electrical, and chemical changes in cyclically contacting polycrystalline silicon surfaces coated with perfluoroalkylsilane self-assembled monolayer I Laboriante, M Fisch, A Payamipour, F Liu, C Carraro, R Maboudian Tribology Letters 44 (1), 13-17, 2011	6	2011
Effect of illlumination on thermionic emission from microfabricated silicon carbide structures JH Lee, I Bargatin, J Provine, F Liu, MK Seo, R Maboudian, ... 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011	6	2011
Graphitization of n-type polycrystalline silicon carbide and its application for micro-supercapacitors F Liu, A Gutes, C Carraro, J Chu, R Maboudian 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011	5	2011
Method for wafer-level surface micromachining to reduce stiction F Liu, K Yang US Patent 9,045,328, 2015	3	2015

En aquests moments el sistema no pot dur a terme l'operació. Torneu-ho a provar més tard.

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