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Taekwon Jee
Taekwon Jee
Correu electrònic verificat a asml.com
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In vitro measurement of the mechanical properties of skin by nano/microindentation methods
T Jee, K Komvopoulos
Journal of biomechanics 47 (5), 1186-1192, 2014
332014
Skin viscoelasticity studied in vitro by microprobe-based techniques
T Jee, K Komvopoulos
Journal of Biomechanics 47 (2), 553-559, 2014
192014
Effect of microstructures of PVDF on surface adhesive forces
T Jee, H Lee, B Mika, H Liang
Tribology Letters 26, 125-130, 2007
192007
Co-optimization of lithographic and patterning processes for improved EPE performance
MJ Maslow, V Timoshkov, T Kiers, TK Jee, P de Loijer, S Morikita, ...
Advanced Etch Technology for Nanopatterning VI 10149, 59-74, 2017
142017
In vitro investigation of skin damage due to microscale shearing
T Jee, K Komvopoulos
Journal of Biomedical Materials Research Part A 102 (11), 4078-4086, 2014
92014
EUV local CDU healing performance and modeling capability towards 5nm node
TK Jee, V Timoshkov, P Choi, D Rio, YC Tsai, H Yaegashi, K Koike, ...
International Conference on Extreme Ultraviolet Lithography 2017 10450, 182-190, 2017
52017
Nanoscale characterization of solution-cast poly (vinylidene fluoride) thinfilms using atomic force microscopy
TK Jee
Texas A&M University, 2007
52007
Evaluation of robust EPE monitoring and control metric methodologies for advanced DRAM nodes yield improvement
Y Abramovitz, JH Yeo, T Jee, HG Lee, SH Lee, CH Park
Metrology, Inspection, and Process Control XXXVI, PC120530N, 2022
42022
Edge placement error wafer mapping and investigation for improvement in advanced DRAM node
KM Chen, W Henke, JH Jung, E Kasperkiewicz, A Bouma, R Rahman, ...
Metrology, Inspection, and Process Control for Semiconductor Manufacturing …, 2021
42021
Atomic Force Microscopic Study of Piezoelectric Polymers
H Lee, K Wang, T Jee, H Liang
Applied Scanning Probe Methods XIII: Biomimetics and Industrial Applications …, 2009
42009
EUV via hole pattern fidelity enhancement through novel resist and post-litho plasma treatment
H Yaegashi, K Koike, C Fonseca, F Yamashita, K Kaushik, S Morikita, ...
Advances in Patterning Materials and Processes XXXV 10586, 1058605, 2018
32018
Co-optimization of exposure dose and etch process for SAQP pitch walk control
MJ Maslow, V Timoshkov, T Kiers, TK Jee, L Reijnen, K Kumar, ...
Optical Microlithography XXXI 10587, 11-24, 2018
22018
Budgeting and predicting pattern defects using edge placement error and machine learning
T Jee, J You, HG Lee, SH Lee, S Hong, J Seo, R Meir, N Oved, J Park, ...
2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-4, 2023
12023
Mechanical and Tribological Properties of Skin Studied by Microscale Indentation and Scratching Techniques
T Jee
UC Berkeley, 2013
12013
Damage of Micropatterned Surfaces Due to Bubble Cavitation-Erosion
T Jee, K Komvopoulos
International Joint Tribology Conference 44199, 33-35, 2010
12010
Effects of microstructures of PVDF on surface adhesive forces
T Jee, H Lee, B Mika, S Mani, H Liang
International Joint Tribology Conference 42592, 1015-1020, 2006
12006
Real time EPE measurement as a yield correlated metrology on advanced DRAM nodes
T Jee, J You, HG Lee, S Hong, J Cho, T Lee, J Seo, M Shifrin, R Porat, ...
Metrology, Inspection, and Process Control XXXVIII 12955, 146-153, 2024
2024
Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment
M Ridane, I Chen, J Song, P Nikolsky, KM Chen, S Lee, S Park, K Lin, ...
Metrology, Inspection, and Process Control XXXVII 12496, 879-885, 2023
2023
Surface Damage of Thin-Film Patterned Electrodes Due to Bubble Collapse
T Jee, SH Yoon, K Komvopoulos
Nanoscience and Nanotechnology Letters 6 (11), 971-975, 2014
2014
En aquests moments el sistema no pot dur a terme l'operació. Torneu-ho a provar més tard.
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