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Toby Hopf
Toby Hopf
Senior Applications Engineer - ASML
Dirección de correo verificada de asml.com
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Año
Controlled shallow single-ion implantation in silicon using an active substrate for sub-20‐keV ions
DN Jamieson, C Yang, T Hopf, SM Hearne, CI Pakes, S Prawer, M Mitic, ...
Applied Physics Letters 86 (20), 2005
2822005
Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
H Mertens, R Ritzenthaler, A Chasin, T Schram, E Kunnen, A Hikavyy, ...
2016 IEEE International Electron Devices Meeting (IEDM), 19.7. 1-19.7. 4, 2016
1572016
Charge state control and relaxation in an atomically doped silicon device
SES Andresen, R Brenner, CJ Wellard, C Yang, T Hopf, CC Escott, ...
Nano letters 7 (7), 2000-2003, 2007
832007
Size-controlled synthesis and gas sensing application of tungsten oxide nanostructures produced by arc discharge
F Fang, J Kennedy, J Futter, T Hopf, A Markwitz, E Manikandan, ...
Nanotechnology 22 (33), 335702, 2011
822011
First monolithic integration of 3d complementary fet (cfet) on 300mm wafers
S Subramanian, M Hosseini, T Chiarella, S Sarkar, P Schuddinck, ...
2020 Ieee Symposium on Vlsi Technology, 1-2, 2020
632020
Forksheet FETs for advanced CMOS scaling: forksheet-nanosheet co-integration and dual work function metal gates at 17nm NP space
H Mertens, R Ritzenthaler, Y Oniki, B Briggs, BT Chan, A Hikavyy, T Hopf, ...
2021 Symposium on VLSI Technology, 1-2, 2021
482021
Local solid phase growth of few-layer graphene on silicon carbide from nickel silicide supersaturated with carbon
E Escobedo-Cousin, K Vassilevski, T Hopf, N Wright, A O'Neill, A Horsfall, ...
Journal of Applied Physics 113 (11), 2013
362013
Buried power rail integration with FinFETs for ultimate CMOS scaling
A Gupta, OV Pedreira, G Arutchelvan, H Zahedmanesh, K Devriendt, ...
IEEE Transactions on Electron Devices 67 (12), 5349-5354, 2020
322020
Shock protection of penetrator-based instrumentation via a sublimation approach
T Hopf, S Kumar, WJ Karl, WT Pike
Advances in Space Research 45 (3), 460-467, 2010
312010
Design, fabrication and testing of a micromachined seismometer with NANO-G resolution
WT Pike, IM Standley, WJ Karl, S Kumar, T Stemple, SJ Vijendran, T Hopf
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
252009
Scaled, novel effective workfunction metal gate stacks for advanced low-V T, gate-all-around vertically stacked nanosheet FETs with reduced vertical distance between sheets
A Veloso, E Simoen, A Oliveira, A Chasin, SC Chen, Y Lin, T Miyashita, ...
International Conference on Solid State Devices and Materials, 2019
242019
Single-ion implantation for the development of Si-based MOSFET devices with quantum functionalities
JC McCallum, DN Jamieson, C Yang, AD Alves, BC Johnson, T Hopf, ...
Advances in Materials Science and Engineering 2012, 2012
222012
Enabling logic with backside connectivity via n-TSVs and its potential as a scaling booster
A Veloso, A Jourdain, G Hiblot, F Schleicher, K D’have, F Sebaai, ...
2021 Symposium on VLSI Technology, 1-2, 2021
172021
Buried power rail integration with Si FinFETs for CMOS scaling beyond the 5 nm node
A Gupta, H Mertens, Z Tao, S Demuynck, J Bömmels, G Arutchelvan, ...
2020 IEEE Symposium on VLSI Technology, 1-2, 2020
162020
Determination of the adhesion energy of graphene on SiC (0001) via measurement of pleat defects
GH Wells, T Hopf, KV Vassilevski, E Escobedo-Cousin, NG Wright, ...
Applied Physics Letters 105 (19), 2014
162014
Implanted counted dopant ions
S Andresen, AS Dzurak, E Gauja, S Hearne, TF Hopf, DN Jamieson, ...
US Patent 7,834,422, 2010
162010
An update on MoonLITE
R Gowen, A Smith, B Winter, C Theobald, K Rees, AJ Ball, A Hagermann, ...
Proceedings of 59th International Astronautical Congress 7, 4359-4369, 2008
152008
Single atom Si nanoelectronics using controlled single-ion implantation
M Mitic, SE Andresen, C Yang, T Hopf, V Chan, E Gauja, FE Hudson, ...
Microelectronic engineering 78, 279-286, 2005
152005
Scaled FinFETs connected by using both wafer sides for routing via buried power rails
A Veloso, A Jourdain, D Radisic, R Chen, G Arutchelvan, B O’Sullivan, ...
IEEE Transactions on Electron Devices 69 (12), 7173-7179, 2022
112022
Quantum effects in ion implanted devices
DN Jamieson, V Chan, FE Hudson, SE Andresen, C Yang, T Hopf, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2006
112006
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Artículos 1–20