M. David Henry
M. David Henry
Sandia National Labs - Principle Member of the Technical Staff
Dirección de correo verificada de sandia.gov
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Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars
MD Henry, S Walavalkar, A Homyk, A Scherer
Nanotechnology 20 (25), 255305, 2009
1622009
Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars
SS Walavalkar, CE Hofmann, AP Homyk, MD Henry, HA Atwater, ...
Nano letters 10 (11), 4423-4428, 2010
932010
Chemical sensing and/or measuring devices and methods
AP Homyk, MD Henry, A Scherer, S Walavalkar
US Patent 9,018,684, 2015
732015
Ga+ beam lithography for nanoscale silicon reactive ion etching
MD Henry, MJ Shearn, B Chhim, A Scherer
Nanotechnology 21 (24), 245303, 2010
732010
ICP etching of silicon for micro and nanoscale devices
MD Henry
California Institute of Technology, 2010
642010
Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films
JFI S. W. Smith, A. R. Kitahara, M. A. Rodriguez, M. D. Henry, M. T. Brumbach
Applied Physics Letters 110 (072901), 2017
522017
Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications
M Shearn, X Sun, MD Henry, A Yariv, A Scherer
Semiconductor technologies, 79-104, 2010
442010
Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
SS Walavalkar, AP Homyk, CE Hofmann, MD Henry, C Shin, HA Atwater, ...
Applied Physics Letters 98 (15), 153114, 2011
332011
Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors
MD Henry, C Welch, A Scherer
Journal of Vacuum Science & Technology A 27 (5), 1211-1216, 2009
332009
Radial pn junction, wire array solar cells
BM Kayes, MA Filler, MD Henry, JR Maiolo Iii, MD Kelzenberg, ...
2008 33rd IEEE Photovoltaic Specialists Conference, 1-5, 2008
322008
Controllable deformation of silicon nanowires with strain up to 24%
SS Walavalkar, AP Homyk, MD Henry, A Scherer
Journal of Applied Physics 107 (12), 124314, 2010
302010
Surface encapsulation for low-loss silicon photonics
M Borselli, TJ Johnson, CP Michael, MD Henry, O Painter
Applied Physics Letters 91 (13), 131117-131117-3, 2007
282007
Three-dimensional etching of silicon for the fabrication of low-dimensional and suspended devices
SS Walavalkar, AP Homyk, MD Henry, A Scherer
Nanoscale 5 (3), 927-931, 2013
242013
Methods for fabrication of high aspect ratio micropillars and nanopillars
MD Henry, AP Homyk, A Scherer, S Walavalkar
US Patent 8,148,264, 2012
212012
Methods for fabricating passivated silicon nanowires and devices thus obtained
A Scherer, S Walavalkar, MD Henry, AP Homyk
US Patent 8,080,468, 2011
212011
Methods for designing, fabricating, and predicting shape formations in a material
M Shearn, MD Henry, A Scherer
US Patent 8,557,613, 2013
182013
Stress dependent oxidation of sputtered niobium and effects on superconductivity
MD Henry, S Wolfley, T Monson, BG Clark, E Shaner, R Jarecki
Journal of Applied Physics 115 (8), 083903, 2014
162014
Method for fabricating micro and nanostructures in a material
MD Henry, M Shearn, A Scherer
US Patent 8,557,612, 2013
152013
Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
MD Henry, AP Homyk, A Scherer, TA Tombrello, S Walavalkar
US Patent 9,005,548, 2015
142015
Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal Annealing
MD Henry, J Nguyen, TR Young, T Bauer, RH Olsson
JMEMS, 1-1, 2013
132013
El sistema no puede realizar la operación en estos momentos. Inténtalo de nuevo más tarde.
Artículos 1–20