Alumina etch masks for fabrication of high-aspect-ratio silicon micropillars and nanopillars MD Henry, S Walavalkar, A Homyk, A Scherer Nanotechnology 20 (25), 255305, 2009 | 162 | 2009 |
Tunable visible and near-IR emission from sub-10 nm etched single-crystal Si nanopillars SS Walavalkar, CE Hofmann, AP Homyk, MD Henry, HA Atwater, ... Nano letters 10 (11), 4423-4428, 2010 | 93 | 2010 |
Chemical sensing and/or measuring devices and methods AP Homyk, MD Henry, A Scherer, S Walavalkar US Patent 9,018,684, 2015 | 73 | 2015 |
Ga+ beam lithography for nanoscale silicon reactive ion etching MD Henry, MJ Shearn, B Chhim, A Scherer Nanotechnology 21 (24), 245303, 2010 | 73 | 2010 |
ICP etching of silicon for micro and nanoscale devices MD Henry California Institute of Technology, 2010 | 64 | 2010 |
Pyroelectric response in crystalline hafnium zirconium oxide (Hf1-xZrxO2) thin films JFI S. W. Smith, A. R. Kitahara, M. A. Rodriguez, M. D. Henry, M. T. Brumbach Applied Physics Letters 110 (072901), 2017 | 52 | 2017 |
Advanced plasma processing: etching, deposition, and wafer bonding techniques for semiconductor applications M Shearn, X Sun, MD Henry, A Yariv, A Scherer Semiconductor technologies, 79-104, 2010 | 44 | 2010 |
Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots SS Walavalkar, AP Homyk, CE Hofmann, MD Henry, C Shin, HA Atwater, ... Applied Physics Letters 98 (15), 153114, 2011 | 33 | 2011 |
Techniques of cryogenic reactive ion etching in silicon for fabrication of sensors MD Henry, C Welch, A Scherer Journal of Vacuum Science & Technology A 27 (5), 1211-1216, 2009 | 33 | 2009 |
Radial pn junction, wire array solar cells BM Kayes, MA Filler, MD Henry, JR Maiolo Iii, MD Kelzenberg, ... 2008 33rd IEEE Photovoltaic Specialists Conference, 1-5, 2008 | 32 | 2008 |
Controllable deformation of silicon nanowires with strain up to 24% SS Walavalkar, AP Homyk, MD Henry, A Scherer Journal of Applied Physics 107 (12), 124314, 2010 | 30 | 2010 |
Surface encapsulation for low-loss silicon photonics M Borselli, TJ Johnson, CP Michael, MD Henry, O Painter Applied Physics Letters 91 (13), 131117-131117-3, 2007 | 28 | 2007 |
Three-dimensional etching of silicon for the fabrication of low-dimensional and suspended devices SS Walavalkar, AP Homyk, MD Henry, A Scherer Nanoscale 5 (3), 927-931, 2013 | 24 | 2013 |
Methods for fabrication of high aspect ratio micropillars and nanopillars MD Henry, AP Homyk, A Scherer, S Walavalkar US Patent 8,148,264, 2012 | 21 | 2012 |
Methods for fabricating passivated silicon nanowires and devices thus obtained A Scherer, S Walavalkar, MD Henry, AP Homyk US Patent 8,080,468, 2011 | 21 | 2011 |
Methods for designing, fabricating, and predicting shape formations in a material M Shearn, MD Henry, A Scherer US Patent 8,557,613, 2013 | 18 | 2013 |
Stress dependent oxidation of sputtered niobium and effects on superconductivity MD Henry, S Wolfley, T Monson, BG Clark, E Shaner, R Jarecki Journal of Applied Physics 115 (8), 083903, 2014 | 16 | 2014 |
Method for fabricating micro and nanostructures in a material MD Henry, M Shearn, A Scherer US Patent 8,557,612, 2013 | 15 | 2013 |
Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars MD Henry, AP Homyk, A Scherer, TA Tombrello, S Walavalkar US Patent 9,005,548, 2015 | 14 | 2015 |
Frequency Trimming of Aluminum Nitride Microresonators Using Rapid Thermal Annealing MD Henry, J Nguyen, TR Young, T Bauer, RH Olsson JMEMS, 1-1, 2013 | 13 | 2013 |