| Silicon carbide as a new MEMS technology PM Sarro Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000 | 496 | 2000 |
| Thermal sensors based on the Seebeck effect AW Van Herwaarden, PM Sarro Sensors and Actuators 10 (3-4), 321-346, 1986 | 445 | 1986 |
| Atomic-scale electron microscopy at ambient pressure JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ... Ultramicroscopy 108 (9), 993-998, 2008 | 328 | 2008 |
| Surface micromachined tuneable interferometer array K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ... Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994 | 295 | 1994 |
| Flexible mirror micromachined in silicon G Vdovin, PM Sarro Applied optics 34 (16), 2968-2972, 1995 | 273 | 1995 |
| Silicon three-axial tactile sensor Z Chu, PM Sarro, S Middelhoek Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996 | 199 | 1996 |
| Optimization of a low-stress silicon nitride process for surface-micromachining applications PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel Sensors and Actuators A: physical 58 (2), 149-157, 1997 | 198 | 1997 |
| Technology and applications of micromachined silicon adaptive mirrors GV Vdovin, S Middelhoek, PM Sarro OptEn 36, 1382-1390, 1997 | 169 | 1997 |
| Low temperature surface passivation for silicon solar cells C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ... Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996 | 166 | 1996 |
| Through-wafer copper electroplating for three-dimensional interconnects NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro Journal of micromechanics and microengineering 12 (4), 395, 2002 | 151 | 2002 |
| Integrated thermopile sensors AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990 | 151 | 1990 |
| Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002 | 146 | 2002 |
| Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers A Berthold, L Nicola, PM Sarro, MJ Vellekoop Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000 | 140 | 2000 |
| Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ... Electrophoresis 22 (12), 2537-2541, 2001 | 136 | 2001 |
| Spray coating of photoresist for pattern transfer on high topography surfaces NP Pham, JN Burghartz, PM Sarro Journal of Micromechanics and Microengineering 15 (4), 691, 2005 | 130 | 2005 |
| Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth G Cocorullo, M Iodice, I Rendina, PM Sarro IEEE photonics technology letters 7 (4), 363-365, 1995 | 117 | 1995 |
| Electrothermal microgripper with large jaw displacement and integrated force sensors TC Duc, GK Lau, JF Creemer, PM Sarro Journal of microelectromechanical systems 17 (6), 1546-1555, 2008 | 113 | 2008 |
| Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002 | 111 | 2002 |
| Microfluidic sensor based on integrated optical hollow waveguides S Campopiano, R Bernini, L Zeni, PM Sarro Optics letters 29 (16), 1894-1896, 2004 | 109 | 2004 |
| Photoresist coating methods for the integration of novel 3-D RF microstructures NP Pham, E Boellaard, JN Burghartz, PM Sarro Journal of Microelectromechanical Systems 13 (3), 491-499, 2004 | 108 | 2004 |
