Richard S. Muller
Richard S. Muller
Correu electrònic verificat a eecs.berkeley.edu
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Device electronics for integrated circuits
RS Muller, TI Kamins, M Chan, PK Ko
Wiley 2, 54, 1986
26331986
Handbook of micro/nano tribology
B Bushan
CRC press, 2020
17282020
Etch rates for micromachining processing
KR Williams, RS Muller
Journal of Microelectromechanical systems 5 (4), 256-269, 1996
9411996
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
9361998
IC-processed electrostatic micromotors
LS Fan, YC Tai, RS Muller
Sensors and actuators 20 (1-2), 41-47, 1989
4851989
Integrated movable micromechanical structures for sensors and actuators
LS Fan, YC Tai, RS Muller
IEEE Transactions on Electron Devices 35 (6), 724-730, 1988
4411988
Magnetically actuated, addressable microstructures
JW Judy, RS Muller
Journal of Microelectromechanical systems 6 (3), 249-256, 1997
3771997
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3481986
Silicon-processed overhanging microgripper
CJ Kim, AP Pisano, RS Muller
Journal of Microelectromechanical Systems 1 (1), 31-36, 1992
3211992
IC-processed electrostatic micro-motors
LS Fan, YC Tai, RS Muller
IEEE, 1988
3171988
Silicon-processed microneedles
L Lin, AP Pisano
Journal of Microelectromechanical Systems 8 (1), 78-84, 1999
3131999
Surface-micromachined microoptical elements and systems
RS Muller, KY Lau
Proceedings of the IEEE 86 (8), 1705-1720, 1998
2691998
Polycrystalline silicon micromechanical beams
RT Howe, RS Muller
Journal of the Electrochemical Society 130 (6), 1420, 1983
2581983
Silicon micromechanics: sensors and actuators on a chip
RT Howe, RS Muller, KJ Gabriel, WSN Trimmer
IEEE spectrum 27 (7), 29-31, 1990
2571990
Hydrogen in lithium niobate
JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez
Advances in Physics 45 (5), 349-392, 1996
2441996
IC-processed electrostatic synchronous micromotors
YC Tai, RS Muller
Sensors and Actuators 20 (1-2), 49-55, 1989
2441989
Investigation of porous silicon for vapor sensing
RC Anderson, RS Muller, CW Tobias
Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989
2311989
Polysilicon microgripper
CJ Kim, AP Pisano, RS Muller, MG Lim
Sensors and Actuators A: Physical 33 (3), 221-227, 1992
2281992
Magnetic microactuation of polysilicon flexure structures
JW Judy, RS Muller, HH Zappe
Journal of microelectromechanical systems 4 (4), 162-169, 1995
2261995
Stroboscopic interferometer system for dynamic MEMS characterization
MR Hart, RA Conant, KY Lau, RS Muller
Journal of microelectromechanical systems 9 (4), 409-418, 2000
2242000
En aquests moments el sistema no pot dur a terme l'operació. Torneu-ho a provar més tard.
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