Patrick Mayrhofer
Patrick Mayrhofer
Insitut für Sensor- und Aktuator Systeme
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High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ...
Applied Physics Letters 105 (13), 133502, 2014
512014
Circular test structure for the determination of piezoelectric constants of ScxAl1− xN thin films applying Laser Doppler Vibrometry and FEM simulations
PM Mayrhofer, H Euchner, A Bittner, U Schmid
Sensors and actuators A: Physical 222, 301-308, 2015
302015
The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films
PM Mayrhofer, C Eisenmenger-Sittner, M Stöger-Pollach, H Euchner, ...
Journal of Applied Physics 115 (19), 193505, 2014
302014
Microstructure and piezoelectric response of YxAl1− xN thin films
PM Mayrhofer, H Riedl, H Euchner, M Stöger-Pollach, PH Mayrhofer, ...
Acta Materialia 100, 81-89, 2015
292015
ScAlN MEMS cantilevers for vibrational energy harvesting purposes
PM Mayrhofer, C Rehlendt, M Fischeneder, M Kucera, E Wistrela, ...
Journal of Microelectromechanical Systems 26 (1), 102-112, 2016
272016
AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance
WB Wang, YQ Fu, JJ Chen, WP Xuan, JK Chen, XZ Wang, P Mayrhofer, ...
Journal of Micromechanics and Microengineering 26 (7), 075006, 2016
122016
Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading
PM Mayrhofer, POÅ Persson, A Bittner, U Schmid
Microsystem Technologies 22 (7), 1679-1689, 2016
112016
Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1−xN thin films
PM Mayrhofer, C Eisenmenger-Sittner, H Euchner, A Bittner, U Schmid
Applied Physics Letters 103 (25), 251903, 2013
82013
Fabrication and characterisation of ScAlN-based piezoelectric MEMS cantilevers
PM Mayrhofer, E Wistrela, M Kucera, A Bittner, U Schmid
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
52015
Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures
R Schmidt, P Mayrhofer, U Schmid, A Bittner
Journal of Applied Physics 125 (8), 084501, 2019
42019
High temperature stability of ScxAl1-xN (x= 0.27) thin films
PM Mayrhofer, A Bittner, U Schmid
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems 9517, 95171C, 2015
42015
Impact of sputter deposition parameters on the microstructural and piezoelectric properties of CrxAl1− xN thin films
E Wistrela, I Schmied, M Schneider, M Gillinger, PM Mayrhofer, A Bittner, ...
Thin Solid Films 648, 76-82, 2018
32018
Fast method for the calculation of surface bending on circular multilayered piezoelectric structures
T Voglhuber-Brunnmaier, EK Reichel, B Jakoby, R Beigelbeck, ...
2016 IEEE SENSORS, 1-3, 2016
12016
Precise determination of d33 and d31 from piezoelectric deflection measurements and 2D FEM simulations applied to ScxAl1-xN
PM Mayrhofer, E Wistrela, M Schneider, A Bittner, U Schmid
Procedia Engineering 168, 876-879, 2016
12016
Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN
PM Mayrhofer, H Euchner, A Bittner, U Schmid
Procedia Engineering 87, 112-115, 2014
12014
Properties of Sc
PM Mayrhofer, POA Persson, A Bittner, U Schmid
2015
1 Review of MEMS Electromagnetic Vibration Energy Harvester Y. Tan, Y. Dong, and X. Wang 17 RF MEMS Inductors and Their Applications—A Review
OF Hikmat, MSM Ali, W Zhang, Y Zou, T Lin, FS Chau, G Zhou, ...
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Artículos 1–17