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Marc Zelsmann
Marc Zelsmann
CNRS, Laboratoire des Technologies de la Microélectronique, Grenoble, France
Correu electrònic verificat a cea.fr
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Seventy-fold enhancement of light extraction from a defectless photonic crystal made on silicon-on-insulator
M Zelsmann, E Picard, T Charvolin, E Hadji, M Heitzmann, B Dal’Zotto, ...
Applied physics letters 83 (13), 2542-2544, 2003
1432003
Fabrication of High‐Density, Large‐Area Conducting‐Polymer Nanostructures
B Dong, N Lu, M Zelsmann, N Kehagias, H Fuchs, CM Sotomayor Torres, ...
Advanced Functional Materials 16 (15), 1937-1942, 2006
902006
Reverse-contact UV nanoimprint lithography for multilayered structure fabrication
N Kehagias, V Reboud, G Chansin, M Zelsmann, C Jeppesen, C Schuster, ...
Nanotechnology 18 (17), 175303, 2007
622007
Improved release strategy for UV nanoimprint lithography
S Garidel, M Zelsmann, N Chaix, P Voisin, J Boussey, A Beaurain, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
612007
Two-dimensional polymer photonic crystal band-edge lasers fabricated by nanoimprint lithography
V Reboud, P Lovera, N Kehagias, M Zelsmann, C Schuster, F Reuther, ...
Applied Physics Letters 91 (15), 2007
512007
Surface-directed dewetting of a block copolymer for fabricating highly uniform nanostructured microdroplets and concentric nanorings
RA Farrell, N Kehagias, MT Shaw, V Reboud, M Zelsmann, JD Holmes, ...
ACS nano 5 (2), 1073-1085, 2011
492011
XPS study of the degradation mechanism of fluorinated anti-sticking treatments used in UV nanoimprint lithography
D Truffier-Boutry, A Beaurain, R Galand, B Pelissier, J Boussey, ...
Microelectronic engineering 87 (2), 122-124, 2010
472010
Chemical degradation of fluorinated antisticking treatments in UV nanoimprint lithography
D Truffier-Boutry, M Zelsmann, J De Girolamo, J Boussey, C Lombard, ...
Applied Physics Letters 94 (4), 2009
422009
Pulsed transfer etching of PS–PDMS block copolymers self-assembled in 193 nm lithography stacks
C Girardot, S Böhme, S Archambault, M Salaün, E Latu-Romain, ...
ACS applied materials & interfaces 6 (18), 16276-16282, 2014
352014
Fabrication of highly ordered sub-20 nm silicon nanopillars by block copolymer lithography combined with resist design
M Salaun, M Zelsmann, S Archambault, D Borah, N Kehagias, C Simao, ...
Journal of Materials Chemistry C 1 (22), 3544-3550, 2013
342013
Spontaneous emission control of colloidal nanocrystals using nanoimprinted photonic crystals
V Reboud, N Kehagias, S Torres, M Zelsmann, M Striccoli, ML Curri, ...
Applied physics letters 90 (1), 2007
332007
Mold cleaning and fluorinated anti-sticking treatments in nanoimprint lithography
D Truffier-Boutry, R Galand, A Beaurain, A Francone, B Pelissier, ...
Microelectronic engineering 86 (4-6), 669-672, 2009
322009
Photoluminescence enhancement in nanoimprinted photonic crystals and coupled surface plasmons
V Reboud, N Kehagias, M Zelsmann, C Schuster, M Fink, F Reuther, ...
Optics Express 15 (12), 7190-7195, 2007
302007
Degradation and surfactant-aided regeneration of fluorinated anti-sticking mold treatments in UV nanoimprint lithography
M Zelsmann, C Alleaume, D Truffier-Boutry, A Francone, A Beaurain, ...
Microelectronic engineering 87 (5-8), 1029-1032, 2010
292010
Characterisation of ultraviolet nanoimprint dedicated resists
P Voisin, M Zelsmann, R Cluzel, E Pargon, C Gourgon, J Boussey
Microelectronic engineering 84 (5-8), 967-972, 2007
292007
Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography
N Kehagias, V Reboud, G Chansin, M Zelsmann, C Jeppesen, F Reuther, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2006
292006
One-year stability of glucose dehydrogenase confined in a 3D carbon nanotube electrode with coated poly-methylene green: Application as bioanode for a glucose biofuel cell
AB Tahar, A Szymczyk, S Tingry, P Vadgama, M Zelsmanne, S Tsujumura, ...
Journal of Electroanalytical Chemistry 847, 113069, 2019
282019
Ultrafast Assembly of PS‐PDMS Block Copolymers on 300 mm Wafers by Blending with Plasticizers
J Arias‐Zapata, S Böhme, J Garnier, C Girardot, A Legrain, M Zelsmann
Advanced Functional Materials 26 (31), 5690-5700, 2016
282016
Broadband optical characterization and modeling of photonic crystal waveguides for silicon optical interconnects
M Zelsmann, E Picard, T Charvolin, E Hadji, M Heitzmann, B Dal’zotto, ...
Journal of applied physics 95 (3), 1606-1608, 2004
282004
High-resolution fused silica mold fabrication for UV-nanoimprint
P Voisin, M Zelsmann, C Gourgon, J Boussey
Microelectronic engineering 84 (5-8), 916-920, 2007
272007
En aquests moments el sistema no pot dur a terme l'operació. Torneu-ho a provar més tard.
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