Gregory N Parsons
Cited by
Cited by
Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition
P Poodt, DC Cameron, E Dickey, SM George, V Kuznetsov, GN Parsons, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (1 …, 2012
Evidence of aluminum silicate formation during chemical vapor deposition of amorphous thin films on Si(100)
TM Klein, D Niu, WS Epling, W Li, DM Maher, CC Hobbs, RI Hegde, ...
Applied Physics Letters 75 (25), 4001-4003, 1999
Low hydrogen content stoichiometric silicon nitride films deposited by plasma‐enhanced chemical vapor deposition
GN Parsons, JH Souk, J Batey
Journal of applied physics 70 (3), 1553-1560, 1991
Physical and electrical characterization of ultrathin yttrium silicate insulators on silicon
JJ Chambers, GN Parsons
Journal of Applied Physics 90 (2), 918-933, 2001
Atomic layer deposition on electrospun polymer fibers as a direct route to Al2O3 microtubes with precise wall thickness control
Q Peng, XY Sun, JC Spagnola, GK Hyde, RJ Spontak, GN Parsons
Nano letters 7 (3), 719-722, 2007
Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
CS Yang, LL Smith, CB Arthur, GN Parsons
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
Three-dimensional self-assembled photonic crystals with high temperature stability for thermal emission modification
KA Arpin, MD Losego, AN Cloud, H Ning, J Mallek, NP Sergeant, L Zhu, ...
Nature communications 4 (1), 1-8, 2013
“Zincone” Zinc Oxide− Organic Hybrid Polymer Thin Films Formed by Molecular Layer Deposition
Q Peng, B Gong, RM VanGundy, GN Parsons
Chemistry of Materials 21 (5), 820-830, 2009
High dielectric constant metal silicates formed by controlled metal-surface reactions
GN Parsons, JJ Chambers, MJ Kelly
US Patent 6,521,911, 2003
Progress and future directions for atomic layer deposition and ALD-based chemistry
GN Parsons, SM George, M Knez
Mrs Bulletin 36 (11), 865-871, 2011
Microcontact patterning of ruthenium gate electrodes by selective area atomic layer deposition
KJ Park, JM Doub, T Gougousi, GN Parsons
Applied Physics Letters 86 (5), 051903, 2005
Temperature-dependent subsurface growth during atomic layer deposition on polypropylene and cellulose fibers
JS Jur, JC Spagnola, K Lee, B Gong, Q Peng, GN Parsons
Langmuir 26 (11), 8239-8244, 2010
Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers
JC Spagnola, B Gong, SA Arvidson, JS Jur, SA Khan, GN Parsons
Journal of Materials Chemistry 20 (20), 4213-4222, 2010
Atomic layer deposition and abrupt wetting transitions on nonwoven polypropylene and woven cotton fabrics
GK Hyde, G Scarel, JC Spagnola, Q Peng, K Lee, B Gong, KG Roberts, ...
Langmuir 26 (4), 2550-2558, 2010
Mechanisms and reactions during atomic layer deposition on polymers
GN Parsons, SE Atanasov, EC Dandley, CK Devine, B Gong, JS Jur, ...
Coordination Chemistry Reviews 257 (23-24), 3323-3331, 2013
Nano-structured photovoltaic solar cell and related methods
G Parsons
US Patent 7,655,860, 2010
Atomic layer deposition of conductive coatings on cotton, paper, and synthetic fibers: conductivity analysis and functional chemical sensing using “all‐fiber” capacitors
JS Jur, WJ Sweet III, CJ Oldham, GN Parsons
Advanced functional materials 21 (11), 1993-2002, 2011
Yttrium silicate formation on silicon: Effect of silicon preoxidation and nitridation on interface reaction kinetics
JJ Chambers, GN Parsons
Applied Physics Letters 77 (15), 2385-2387, 2000
Crossing the divide between homogeneous and heterogeneous catalysis in water oxidation
AK Vannucci, L Alibabaei, MD Losego, JJ Concepcion, B Kalanyan, ...
Proceedings of the National Academy of Sciences 110 (52), 20918-20922, 2013
Atomic layer deposition of conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: effect of surface topology on film growth characteristics
GK Hyde, KJ Park, SM Stewart, JP Hinestroza, GN Parsons
Langmuir 23 (19), 9844-9849, 2007
The system can't perform the operation now. Try again later.
Articles 1–20