Optical properties and structure of HfO2 thin films grown by high pressure reactive sputtering FL Martínez, M Toledano-Luque, JJ Gandía, J Cárabe, W Bohne, ...
Journal of Physics D: Applied Physics 40 (17), 5256, 2007
231 2007 Rapid thermal annealing effects on the structural properties and density of defects in and films deposited by electron cyclotron resonance E San Andrés, A Del Prado, FL Martınez, I Mártil, D Bravo, FJ López
Journal of Applied Physics 87 (3), 1187-1192, 2000
102 2000 Influence of rapid thermal annealing processes on the properties of SiNx: H films deposited by the electron cyclotron resonance method FL Martınez, I Mártil, G González-Dıaz, B Selle, I Sieber
Journal of non-crystalline solids 227, 523-527, 1998
59 1998 Composition and optical properties of silicon oxynitride films deposited by electron cyclotron resonance A Del Prado, E San Andrés, FL Martınez, I Mártil, G González-Dı́az, ...
Vacuum 67 (3-4), 507-512, 2002
58 2002 Molecular models and activation energies for bonding rearrangement in plasma-deposited dielectric thin films treated by rapid thermal annealing FL Martinez, A Del Prado, I Mártil, G González-Diaz, W Bohne, W Fuhs, ...
Physical Review B 63 (24), 245320, 2001
57 2001 Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method FL Martınez, R Ruiz-Merino, A Del Prado, E San Andrés, I Mártil, ...
Thin Solid Films 459 (1-2), 203-207, 2004
48 2004 Thermally induced changes in the optical properties of films deposited by the electron cyclotron resonance plasma method FL Martınez, A Del Prado, I Mártil, G González-Dıaz, B Selle, I Sieber
Journal of applied physics 86 (4), 2055-2061, 1999
36 1999 Defect structure of films and its evolution with annealing temperature FL Martınez, A Del Prado, I Mártil, D Bravo, FJ López
Journal of Applied Physics 88 (4), 2149-2151, 2000
32 2000 Substrate integrated waveguide (SIW) with Koch fractal electromagnetic bandgap structures (KFEBG) for bandpass filter design J de Dios Ruiz, FL Martı, A Alvarez-Melcon, J Hinojosa
IEEE Microwave and Wireless Components Letters 25 (3), 160-162, 2015
31 2015 Characterization of polycrystalline Cu (In, Ga) Te2 thin films prepared by pulsed laser deposition VF Gremenok, RW Martin, IV Bodnar, MV Yakushev, W Schmitz, K Bente, ...
Thin Solid Films 394 (1-2), 23-28, 2001
28 2001 Fabrication and characterisation of thin low-temperature MBE-compatible silicon oxides of different stoichiometry A Strass, P Bieringer, W Hansch, V Fuenzalida, A Alvarez, J Luna, I Martil, ...
Thin Solid Films 349 (1-2), 135-146, 1999
28 1999 Compact bandstop half-mode substrate integrated waveguide filter based on a broadside-coupled open split-ring resonator J Hinojosa, M Rossi, A Saura-Ródenas, A Álvarez-Melcón, ...
IEEE Transactions on Microwave Theory and Techniques 66 (6), 3001-3010, 2018
25 2018 Compositional analysis of amorphous SiNx : H films by ERDA and infrared spectroscopy W Bohne, W Fuhs, J Röhrich, B Selle, G González‐Díaz, I Mártil, ...
Surface and Interface Analysis: An International Journal devoted to the …, 2000
25 2000 Effect of substrate temperature in films deposited by electron cyclotron resonance A Del Prado, FL Martınez, I Mártil, G González-Dıaz, M Fernández
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (4 …, 1999
22 1999 Temperature effects on the electrical properties and structure of interfacial and bulk defects in devices FL Martınez, E San Andrés, A Del Prado, I Mártil, D Bravo, FJ López
Journal of Applied Physics 90 (3), 1573-1581, 2001
21 2001 Thermal stability of films deposited by plasma electron cyclotron resonance FL Martınez, A Del Prado, D Bravo, F López, I Mártil, G González-Dıaz
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (4 …, 1999
21 1999 Physical properties of high pressure reactively sputtered hafnium oxide M Toledano-Luque, FL Martínez, E San Andres, A Del Prado, I Martil, ...
Vacuum 82 (12), 1391-1394, 2008
20 2008 Low-frequency CMOS bandpass filter for PIR sensors in wireless sensor nodes G Domenech-Asensi, JM Carrillo-Calleja, J Illade-Quinteiro, ...
IEEE Sensors Journal 14 (11), 4085-4094, 2014
19 2014 Rapid thermally annealed plasma deposited thin films: Application to metal–insulator–semiconductor structures with Si, and InP I Mártil, A Del Prado, E San Andrés, G González Dıáz, FL Martınez
Journal of applied physics 94 (4), 2642-2653, 2003
19 2003 Compositional analysis of SiOx Ny :H films by heavy‐ion ERDA: the problem of radiation damage W Bohne, W Fuhs, J Röhrich, B Selle, I Sieber, A Del Prado, ...
Surface and Interface Analysis: An International Journal devoted to the …, 2002
19 2002