| Illuminating device M Muraki, M Aketagawa, T Shiozawa US Patent 4,974,919, 1990 | 158 | 1990 |
| Development of a roughness measurement standard with irregular surface topography for improving 3D surface texture measurement K Nemoto, K Yanagi, M Aketagawa, I Yoshida, M Uchidate, T Miyaguchi, ... Measurement Science and Technology 20 (8), 084023, 2009 | 69 | 2009 |
| Exposure method and apparatus N Sano, M Aketagawa, H Nakano, T Shiozawa US Patent 5,121,160, 1992 | 64 | 1992 |
| Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers M Madden, M Aketagawa, T Kumagai, Y Maeda, E Okuyama Measurement Science and Technology 25 (9), 094005, 2014 | 35 | 2014 |
| Length measurement using a regular crystalline lattice and a dual tunnelling unit scanning tunnelling microscope in a thermo-stabilized cell M Aketagawa, K Takada, K Kobayashi, N Takeshima, M Noro, ... Measurement Science and Technology 9 (7), 1076, 1998 | 33 | 1998 |
| Accurate displacement-measuring interferometer with wide range using an I2 frequency-stabilized laser diode based on sinusoidal frequency modulation TT Vu, M Higuchi, M Aketagawa Measurement Science and Technology 27 (10), 105201, 2016 | 31 | 2016 |
| Measurement of air-refractive-index fluctuation from laser frequency shift with uncertainty of order 10− 9 TB Quoc, M Ishige, Y Ohkubo, M Aketagawa Measurement Science and Technology 20 (12), 125302, 2009 | 30 | 2009 |
| Exposure apparatus M Aketagawa US Patent 4,905,041, 1990 | 30 | 1990 |
| Measurement of air-refractive-index fluctuation from frequency change using a phase modulation homodyne interferometer and an external cavity laser diode M Ishige, M Aketagawa, TB Quoc, Y Hoshino Measurement Science and Technology 20 (8), 084019, 2009 | 28 | 2009 |
| Direct measurement instrument for lattice spacing on regular crystalline surfaces using a scanning tunneling microscope and laser interferometry P Rerkkumsup, M Aketagawa, K Takada, T Watanabe, S Sadakata Review of scientific instruments 74 (3), 1205-1210, 2003 | 28 | 2003 |
| Optical encoder calibration using lattice spacing and optical fringe derived from a scanning tunnelling microscope and optical interferometer M Aketagawa, Y Ikeda, N Tanyarat, M Ishige Measurement Science and Technology 18 (2), 503, 2007 | 26 | 2007 |
| Tracking and stepping control of the tip position of a scanning tunneling microscope by referring to atomic points and arrays on a regular crystalline surface M Aketagawa, K Takada, Y Minao, Y Oka, JD Lee Review of scientific instruments 70 (4), 2053-2059, 1999 | 26 | 1999 |
| Comparison of length measurements provided by a femtosecond optical frequency comb D Wei, M Aketagawa Optics Express 22 (6), 7040-7045, 2014 | 25 | 2014 |
| 19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage TD Nguyen, QA Duong, M Higuchi, TT Vu, D Wei, M Aketagawa Sensors and Actuators A: Physical 304, 111880, 2020 | 24 | 2020 |
| Iodine-frequency-stabilized laser diode and displacement-measuring interferometer based on sinusoidal phase modulation QA Duong, TT Vu, M Higuchi, D Wei, M Aketagawa Measurement Science and Technology 29 (6), 065204, 2018 | 22 | 2018 |
| Correction of distorted STM image by using a regular crystalline lattice and 2D FFT M Aketagawa, K Takada Nanotechnology 6 (4), 105, 1995 | 21 | 1995 |
| Two-dimensional encoder with picometre resolution using lattice spacing on regular crystalline surface as standard M Aketagawa, H Honda, M Ishige, C Patamaporn Measurement Science and Technology 18 (2), 342, 2007 | 19 | 2007 |
| Long atomic imaging over a 5-μm-long region using an ultralow thermally drifted dual-tunneling-unit scanning tunneling microscope in a thermostabilized cell M Aketagawa, K Takada, N Takeshima, K Yamada, JD Lee Review of scientific instruments 70 (1), 133-136, 1999 | 19 | 1999 |
| Highly stable atom-tracking scanning tunneling microscopy P Rerkkumsup, M Aketagawa, K Takada, Y Togawa, NT Thinh, Y Kozuma Review of scientific instruments 75 (4), 1061-1067, 2004 | 18 | 2004 |
| Active suppression of air refractive index fluctuation using a Fabry–Perot cavity and a piezoelectric volume actuator TQ Banh, Y Ohkubo, Y Murai, M Aketagawa Applied Optics 50 (1), 53-60, 2011 | 17 | 2011 |
