A review on piezoelectric energy harvesting: materials, methods, and circuits S Priya, HC Song, Y Zhou, R Varghese, A Chopra, SG Kim, I Kanno, L Wu, ...
Energy Harvesting and Systems 4 (1), 3-39, 2017
418 2017 Piezoelectric MEMS for energy harvesting SG Kim, S Priya, I Kanno
MRS bulletin 37 (11), 1039-1050, 2012
357 2012 Piezoelectric properties of -axis oriented thin films I Kanno, S Fujii, T Kamada, R Takayama
Applied Physics Letters 70 (11), 1378-1380, 1997
301 1997 Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS K Wasa, I Kanno, H Kotera
William Andrew, 2012
293 2012 Measurement of transverse piezoelectric properties of PZT thin films I Kanno, H Kotera, K Wasa
Sensors and Actuators A: Physical 107 (1), 68-74, 2003
264 2003 Superlattices of PbZrO3 and PbTiO3 prepared by multi‐ion‐beam sputtering I Kanno, S Hayashi, R Takayama, T Hirao
Applied physics letters 68 (3), 328-330, 1996
186 1996 High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers K Morimoto, I Kanno, K Wasa, H Kotera
Sensors and Actuators A: Physical 163 (1), 428-432, 2010
180 2010 Characterization and aging response of the piezoelectric coefficient of lead zirconate titanate thin films JF Shepard Jr, F Chu, I Kanno, S Trolier-McKinstry
Journal of Applied Physics 85 (9), 6711-6716, 1999
155 1999 Piezoelectric properties of (K, Na) NbO3 films deposited by RF magnetron sputtering K Shibata, F Oka, A Ohishi, T Mishima, I Kanno
Applied physics express 1 (1), 011501, 2008
152 2008 Concepts for a new class of all-polymer micropumps JJ Loverich, I Kanno, H Kotera
Lab on a Chip 6 (9), 1147-1154, 2006
144 2006 Power-generation performance of lead-free (K, Na) NbO3 piezoelectric thin-film energy harvesters I Kanno, T Ichida, K Adachi, H Kotera, K Shibata, T Mishima
Sensors and Actuators A: Physical 179, 132-136, 2012
141 2012 Pulsed laser deposition of high-quality (K, Na) NbO3 thin films on SrTiO3 substrate using high-density ceramic targets T Saito, T Wada, H Adachi, I Kanno
Japanese journal of applied physics 43 (9S), 6627, 2004
124 2004 Micro cell encapsulation and its hydrogel-beads production using microfluidic device H Shintaku, T Kuwabara, S Kawano, T Suzuki, I Kanno, H Kotera
Microsystem technologies 13, 951-958, 2007
122 2007 Crystallographic characterization of epitaxial films with different ratio grown by radio-frequency-magnetron sputtering I Kanno, H Kotera, K Wasa, T Matsunaga, T Kamada, R Takayama
Journal of Applied Physics 93 (7), 4091-4096, 2003
105 2003 Development of deformable mirror composed of piezoelectric thin films for adaptive optics I Kanno, T Kunisawa, T Suzuki, H Kotera
IEEE journal of selected topics in quantum electronics 13 (2), 155-161, 2007
104 2007 Comparison of effective transverse piezoelectric coefficients e31, f of Pb (Zr, Ti) O3 thin films between direct and converse piezoelectric effects Y Tsujiura, S Kawabe, F Kurokawa, H Hida, I Kanno
Japanese Journal of Applied Physics 54 (10S), 10NA04, 2015
91 2015 Piezoelectric MEMS: Ferroelectric thin films for MEMS applications I Kanno
Japanese Journal of Applied Physics 57 (4), 040101, 2018
90 2018 Thin-film piezoelectric materials for a better energy harvesting MEMS K Wasa, T Matsushima, H Adachi, I Kanno, H Kotera
Journal of microelectromechanical systems 21 (2), 451-457, 2012
90 2012 Low-temperature preparation of Pb (Zr, Ti) O3 thin films on (Pb, La) TiO3 buffer layer by multi-ion-beam sputtering I Kanno, S Hayashi, T Kamada, MKM Kitagawa, THT Hirao
Japanese journal of applied physics 32 (9S), 4057, 1993
83 1993 Thermodynamic study of c -axis-oriented epitaxial thin films I Kanno, Y Yokoyama, H Kotera, K Wasa
Physical Review B 69 (6), 064103, 2004
77 2004