On the breakdown statistics of very thin SiO2 films J Suñé, I Placencia, N Barniol, E Farrés, F Martin, X Aymerich
Thin solid films 185 (2), 347-362, 1990
292 1990 Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ...
Nanotechnology 12 (2), 100, 2001
177 2001 Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ...
IEEE electron device letters 29 (2), 146-148, 2008
151 2008 Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ...
Applied Physics Letters 87 (4), 2005
151 2005 Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ...
Journal of applied physics 78 (11), 6797-6801, 1995
126 1995 AFM lithography of aluminum for fabrication of nanomechanical systems ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ...
Ultramicroscopy 97 (1-4), 467-472, 2003
112 2003 Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies JL Lopez, J Verd, J Teva, G Murillo, J Giner, F Torres, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 19 (1), 015002, 2008
110 2008 CMOS–MEMS resonators: From devices to applications A Uranga, J Verd, N Barniol
Microelectronic Engineering 132, 58-73, 2015
104 2015 Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ...
Journal of microelectromechanical systems 14 (3), 508-519, 2005
100 2005 Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ...
IEEE Electron Device Letters 27 (6), 495-497, 2006
94 2006 Nondestructive multiple breakdown events in very thin SiO2 films J Suñé, E Farrés, I Placencia, N Barniol, F Martín, X Aymerich
Applied Physics Letters 55 (2), 128-130, 1989
94 1989 Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ...
Applied physics letters 91 (1), 2007
85 2007 A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- JL Lopez, J Verd, A Uranga, J Giner, G Murillo, F Torres, G Abadal, ...
IEEE Electron Device Letters 30 (7), 718-720, 2009
82 2009 Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions N Barniol, F Pérez‐Murano, X Aymerich
Applied Physics Letters 61 (4), 462-464, 1992
75 1992 Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM. G Abadal, F Perez-Murano, N Barniol, X Aymerich
Applied Physics A: Materials Science & Processing 66 (7), 1998
73 1998 Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol
Sensors and Actuators A: Physical 197, 88-95, 2013
71 2013 Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry ZJ Davis, G Abadal, B Helbo, O Hansen, F Campabadal, F Pérez-Murano, ...
Sensors and Actuators A: Physical 105 (3), 311-319, 2003
69 2003 System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection M Villarroya, J Verd, J Teva, G Abadal, E Forsen, FP Murano, A Uranga, ...
Sensors and Actuators A: Physical 132 (1), 154-164, 2006
67 2006 Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators H Campanella, J Esteve, J Montserrat, A Uranga, G Abadal, N Barniol, ...
Applied physics letters 89 (3), 2006
63 2006 Nanometer scale lithography of silicon (100) surfaces using tapping mode atomic force microscopy J Servat, P Gorostiza, F Sanz, F Pérez‐Murano, N Barniol, G Abadal, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 14 (3 …, 1996
56 1996 
arantxa urangaTitular de Universidad, Universitat Autònoma de BarcelonaDirección de correo verificada de uab.es
