Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation R Garcı́a, M Calleja, F Pérez-Murano Applied Physics Letters 72 (18), 2295-2297, 1998 | 258 | 1998 |
Mechanical detection of carbon nanotube resonator vibrations D Garcia-Sanchez, A San Paulo, MJ Esplandiu, F Perez-Murano, L Forró, ... Physical review letters 99 (8), 085501, 2007 | 243 | 2007 |
Increasing the elastic modulus of graphene by controlled defect creation G López-Polín, C Gómez-Navarro, V Parente, F Guinea, MI Katsnelson, ... Nature Physics 11 (1), 26-31, 2015 | 237 | 2015 |
Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection G Abadal, ZJ Davis, B Helbo, X Borrise, R Ruiz, A Boisen, F Campabadal, ... Nanotechnology 12 (2), 100, 2001 | 164 | 2001 |
STM-induced hydrogen desorption via a hole resonance K Stokbro, C Thirstrup, M Sakurai, U Quaade, BYK Hu, F Perez-Murano, ... Physical review letters 80 (12), 2618, 1998 | 162 | 1998 |
Investigation of nanodispersion in polystyrene–montmorillonite nanocomposites by solid‐state NMR S Bourbigot, DL VanderHart, JW Gilman, WH Awad, RD Davis, ... Journal of Polymer Science Part B: Polymer Physics 41 (24), 3188-3213, 2003 | 145 | 2003 |
Predictive model for scanned probe oxidation kinetics JA Dagata, F Perez-Murano, G Abadal, K Morimoto, T Inoue, J Itoh, ... Applied Physics Letters 76 (19), 2710-2712, 2000 | 143 | 2000 |
Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry E Forsen, G Abadal, S Ghatnekar-Nilsson, J Teva, J Verd, R Sandberg, ... Applied Physics Letters 87 (4), 043507, 2005 | 142 | 2005 |
Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range J Verd, A Uranga, G Abadal, JL Teva, F Torres, J Lopez, F Perez-Murano, ... IEEE electron device letters 29 (2), 146-148, 2008 | 137 | 2008 |
Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications N Kacem, J Arcamone, F Perez-Murano, S Hentz Journal of Micromechanics and Microengineering 20 (4), 045023, 2010 | 131 | 2010 |
Nanometer‐scale oxidation of Si (100) surfaces by tapping mode atomic force microscopy F Pérez‐Murano, G Abadal, N Barniol, X Aymerich, J Servat, P Gorostiza, ... Journal of applied physics 78 (11), 6797-6801, 1995 | 119 | 1995 |
Anisotropic growth of long isolated graphene ribbons on the C face of graphite-capped 6 H-SiC N Camara, JR Huntzinger, G Rius, A Tiberj, N Mestres, F Pérez-Murano, ... Physical Review B 80 (12), 125410, 2009 | 116 | 2009 |
Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion JA Dagata, F Perez-Murano, C Martin, H Kuramochi, H Yokoyama Journal of applied physics 96 (4), 2386-2392, 2004 | 113 | 2004 |
AFM lithography of aluminum for fabrication of nanomechanical systems ZJ Davis, G Abadal, O Hansen, X Borise, N Barniol, F Perez-Murano, ... Ultramicroscopy 97 (1-4), 467-472, 2003 | 105 | 2003 |
Voltage modulation scanned probe oxidation F Pérez-Murano, K Birkelund, K Morimoto, JA Dagata Applied physics letters 75 (2), 199-201, 1999 | 99 | 1999 |
Nanolithography on thin layers of PMMA using atomic force microscopy C Martín, G Rius, X Borrisé, F Pérez-Murano Nanotechnology 16 (8), 1016, 2005 | 96 | 2005 |
Nanometre-scale oxidation of silicon surfaces by dynamic force microscopy: reproducibility, kinetics and nanofabrication M Calleja, J Anguita, R Garcia, K Birkelund, F Pérez-Murano, JA Dagata Nanotechnology 10 (1), 34, 1999 | 93 | 1999 |
Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit J Verd, G Abadal, J Teva, MV Gaudó, A Uranga, X Borrisé, F Campabadal, ... Journal of microelectromechanical systems 14 (3), 508-519, 2005 | 91 | 2005 |
Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications J Verd, A Uranga, J Teva, JL Lopez, F Torres, J Esteve, G Abadal, ... IEEE Electron Device Letters 27 (6), 495-497, 2006 | 86 | 2006 |
Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions J Verd, A Uranga, G Abadal, J Teva, F Torres, F Pérez-Murano, ... Applied physics letters 91 (1), 013501, 2007 | 78 | 2007 |