Energy harvesters driven by broadband random vibrations E Halvorsen
Journal of Microelectromechanical Systems 17 (5), 1061-1071, 2008
222 2008 Sealing of adhesive bonded devices on wafer level J Oberhammer, F Niklaus, G Stemme
Sensors and Actuators A: Physical 110 (1-3), 407-412, 2004
163 2004 Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities J Oberhammer, F Niklaus, G Stemme
Sensors and Actuators A: Physical 105 (3), 297-304, 2003
141 2003 Millimeter-wave tissue diagnosis: The most promising fields for medical applications F Topfer, J Oberhammer
IEEE Microwave Magazine 16 (4), 97-113, 2015
117 2015 A ruthenium-based multimetal-contact RF MEMS switch with a corrugated diaphragm F Ke, J Miao, J Oberhammer
Journal of microelectromechanical systems 17 (6), 1447-1459, 2008
99 2008 A very low loss 220–325 GHz silicon micromachined waveguide technology B Beuerle, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz science and technology 8 (2), 248-250, 2018
86 2018 BCB contact printing for patterned adhesive full-wafer bonded 0-level packages J Oberhammer, G Stemme
Journal of Microelectromechanical systems 14 (2), 419-425, 2005
77 2005 Binary-Coded 4.25-bit -Band Monocrystalline–Silicon MEMS Multistage Dielectric-Block Phase Shifters N Somjit, G Stemme, J Oberhammer
IEEE transactions on microwave theory and techniques 57 (11), 2834-2840, 2009
68 2009 Millimeter-wave near-field probe designed for high-resolution skin cancer diagnosis F Töpfer, S Dudorov, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 63 (6), 2050-2059, 2015
65 2015 Millimeter-wave near-field probe designed for high-resolution skin cancer diagnosis F Töpfer, S Dudorov, J Oberhammer
IEEE Transactions on Microwave Theory and Techniques 63 (6), 2050-2059, 2015
65 2015 A low-profile and high-gain frequency beam steering subterahertz antenna enabled by silicon micromachining A Gomez-Torrent, M Garcia-Vigueras, L Le Coq, A Mahmoud, M Ettorre, ...
IEEE Transactions on Antennas and Propagation 68 (2), 672-682, 2019
64 2019 a 500–750 ghz rf mems waveguide switch U Shah, T Reck, H Frid, C Jung-Kubiak, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 7 (3), 326-334, 2017
64 2017 Mechanically tri-stable, true single-pole-double-throw (SPDT) switches J Oberhammer, M Tang, AQ Liu, G Stemme
Journal of Micromechanics and Microengineering 16 (11), 2251, 2006
59 2006 Submillimeter-wave 3.3-bit RF MEMS phase shifter integrated in micromachined waveguide U Shah, E Decrossas, C Jung-Kubiak, T Reck, G Chattopadhyay, I Mehdi, ...
IEEE Transactions on Terahertz Science and Technology 6 (5), 706-715, 2016
56 2016 Active opening force and passive contact force electrostatic switches for soft metal contact materials J Oberhammer, G Stemme
Journal of microelectromechanical systems 15 (5), 1235-1242, 2006
53 2006 Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch J Oberhammer, G Stemme
Journal of Microelectromechanical Systems 13 (3), 421-428, 2004
53 2004 Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator J Oberhammer, G Stemme
IEEE Transactions on Electron Devices 51 (1), 149-155, 2004
53 2004 High-aspect-ratio through silicon vias for high-frequency application fabricated by magnetic assembly of gold-coated nickel wires SJ Bleiker, AC Fischer, U Shah, N Somjit, T Haraldsson, N Roxhed, ...
IEEE Transactions on components, packaging and Manufacturing technology 5 (1 …, 2014
49 2014 RF MEMS high-impedance tuneable metamaterials for millimeter-wave beam steering M Sterner, D Chicherin, AV Raisenen, G Stemme, J Oberhammer
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
48 2009 Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700 O Glubokov, X Zhao, J Campion, U Shah, J Oberhammer
IEEE Transactions on Terahertz Science and Technology 9 (1), 106-108, 2018
47 2018