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Soheil Azimi
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Deep vertical etching of silicon wafers using a hydrogenation-assisted reactive ion etching
A Sammak, S Azimi, N Izadi, BK Hosseinieh, S Mohajerzadeh
Journal of microelectromechanical systems 16 (4), 912-918, 2007
712007
Monitoring the spreading stage of lung cells by silicon nanowire electrical cell impedance sensor for cancer detection purposes
H Abiri, M Abdolahad, M Gharooni, SA Hosseini, M Janmaleki, S Azimi, ...
Biosensors and Bioelectronics 68, 577-585, 2015
552015
A high-performance piezoelectric vibration sensor
B Yaghootkar, S Azimi, B Bahreyni
IEEE Sensors Journal 17 (13), 4005-4012, 2017
442017
A nonlinear rate microsensor utilising internal resonance
A Sarrafan, S Azimi, F Golnaraghi, B Bahreyni
Scientific reports 9 (1), 8648, 2019
382019
Three-dimensional etching of silicon substrates using a modified deep reactive ion etching technique
S Azimi, A Sandoughsaz, B Amirsolaimani, J Naghsh-Nilchi, ...
Journal of Micromechanics and Microengineering 21 (7), 074005, 2011
342011
A wideband, low-noise accelerometer for sonar wave detection
F Edalafar, S Azimi, AQA Qureshi, B Yaghootkar, A Keast, W Friedrich, ...
IEEE Sensors Journal 18 (2), 508-516, 2017
272017
Selective deposition of CuO/SnO2 sol–gel on porous SiO2 suitable for the fabrication of MEMS-based H2S sensors
A Ebrahimi, A Pirouz, Y Abdi, S Azimi, S Mohajerzadeh
Sensors and Actuators B: Chemical 173, 802-810, 2012
212012
Highly featured amorphous silicon nanorod arrays for high-performance lithium-ion batteries
S Soleimani-Amiri, SA Safiabadi Tali, S Azimi, Z Sanaee, S Mohajerzadeh
Applied Physics Letters 105 (19), 2014
202014
Formation of three-dimensional and nanowall structures on silicon using a hydrogen-assisted high aspect ratio etching
S Azimi, M Mehran, A Amini, A Vali, S Mohajerzadeh, M Fathipour
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2010
202010
Design, fabrication and characterization of a high performance MEMS accelerometer
F Edalatfar, B Yaghootkar, AQA Qureshi, S Azimi, B Bahreyni
2016 IEEE SENSORS, 1-3, 2016
162016
A single-cell correlative nanoelectromechanosensing approach to detect cancerous transformation: monitoring the function of F-actin microfilaments in the modulation of the ion …
M Abdolahad, A Saeidi, M Janmaleki, O Mashinchian, M Taghinejad, ...
Nanoscale 7 (5), 1879-1887, 2015
142015
Realization of complex three-dimensional free-standing structures on silicon substrates using controllable underetching in a deep reactive ion etching
A Sandoughsaz, S Azimi, H Mazreati, S Mohajerzadeh
Journal of Micromechanics and Microengineering 23 (3), 035022, 2013
132013
Development of a micromachined accelerometer for particle acceleration detection
F Edalatfar, B Yaghootkar, AQA Qureshi, S Azimi, A Leung, B Bahreyni
Sensors and Actuators A: Physical 280, 359-367, 2018
112018
Evolution of high aspect ratio and nano-grass structures using a modified low plasma density reactive ion etching
M Mehran, Z Kolahdouz, Z Sanaee, S Azimi, S Mohajerzadeh
The European Physical Journal Applied Physics 55 (1), 11302, 2011
112011
Wideband, low-noise accelerometer with open loop dynamic range of better than 135DB
F Edalatfar, S Azimi, AQA Qureshi, B Yaghootkar, B Bahreyni
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
82017
Wideband piezoelectric mems vibration sensor
B Yaghootkar, S Azimi, B Bahreyni
2016 IEEE SENSORS, 1-3, 2016
82016
Realization of Three-Dimensional Si and SiO2 Nanowall Structures Using Reactive Ion Etching
S Azimi, A Sandoughsaz, S Mohajerzadeh
Journal of Microelectromechanical Systems 20 (2), 353-354, 2011
82011
Hydrogenation-assisted lateral micromachining of (111) silicon wafers
S Darbari, S Azimi, S Mohajerzadeh, A Sammak, N Izadi, S Famini
Journal of microelectromechanical systems 17 (6), 1489-1494, 2008
82008
Silicon nanowire fabrication using novel hydrogenation-assisted deep reactive ion etching
A Sammak, S Azimi, S Mohajerzadeh, B Khadem-Hosseini, B Fallah-Azad
2007 International Semiconductor Device Research Symposium, 1-2, 2007
82007
Acceleration-based window glass break detection
KW Hawk, S Azimi, T Grey, B Bahreyni
US Patent 10,346,132, 2019
52019
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