Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets P Sigmund Physical review 184 (2), 383, 1969 | 4748 | 1969 |
Spatial Distribution of Energy Deposited by Atomic Particles in Elastic Collissions KB Winterbon, P Sigmund, JB Sanders I kommission hos Munksgaard, 1970 | 789 | 1970 |
A mechanism of surface micro-roughening by ion bombardment P Sigmund Journal of Materials Science 8, 1545-1553, 1973 | 679 | 1973 |
Sputtering by ion bombardment theoretical concepts P Sigmund Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element …, 2005 | 608 | 2005 |
Particle penetration and radiation effects volume 2 P Sigmund Springer series in solid-state sciences 179, 2014 | 591* | 2014 |
Small-angle multiple scattering of ions in the screened Coulomb region: I. Angular distributions P Sigmund, KB Winterbon Nuclear Instruments and Methods 119, 541-557, 1974 | 585 | 1974 |
Energy density and time constant of heavy‐ion‐induced elastic‐collision spikes in solids P Sigmund Applied Physics Letters 25 (3), 169-171, 1974 | 542 | 1974 |
Theoretical aspects of atomic mixing by ion beams P Sigmund, A Gras-Marti Nuclear Instruments and Methods 182, 25-41, 1981 | 535 | 1981 |
Influence of elastic and inelastic scattering on energy spectra of electrons emitted from solids S Tougaard, P Sigmund Physical Review B 25 (7), 4452, 1982 | 529 | 1982 |
Sputtering by particle bombardment I P Sigmund, R Behrisch Topics in Applied Physics 47, 9, 1981 | 517 | 1981 |
Sputtering from elastic‐collision spikes in heavy‐ion‐bombarded metals P Sigmund, C Claussen Journal of Applied Physics 52 (2), 990-993, 1981 | 424 | 1981 |
On the number of atoms displaced by implanted ions or energetic recoil atoms P Sigmund Applied physics letters 14 (3), 114-117, 1969 | 424 | 1969 |
Mechanisms and theory of physical sputtering by particle impact P Sigmund Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1987 | 417 | 1987 |
Sputtering of chemisorbed gas (nitrogen on tungsten) by low‐energy ions HF Winters, P Sigmund journal of Applied Physics 45 (11), 4760-4766, 1974 | 342 | 1974 |
Kinetic theory of particle stopping in a medium with internal motion P Sigmund Physical Review A 26 (5), 2497, 1982 | 293 | 1982 |
Binary theory of electronic stopping P Sigmund, A Schinner Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2002 | 229 | 2002 |
Collison Theory of Displacement Damage, Ion Range and Sputtering P Sigmund Rev. Roum. Phys. 17, 823-870, 1972 | 228 | 1972 |
Distortion of depth profiles during sputtering: I. General description of collisional mixing P Sigmund, A Gras-Marti Nuclear Instruments and Methods 168 (1-3), 389-394, 1980 | 226 | 1980 |
A note on integral equations of the Kinchin-Pease type P Sigmund Radiation effects 1 (1), 15-18, 1969 | 212 | 1969 |
Stopping of heavy ions: a theoretical approach P Sigmund Springer Science & Business Media, 2004 | 190 | 2004 |