Achim Bittner
Achim Bittner
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Design-dependent performance of self-actuated and self-sensing piezoelectric-AlN cantilevers in liquid media oscillating in the fundamental in-plane bending mode
M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ...
Sensors and Actuators B: Chemical 200, 235-244, 2014
High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient
W Wang, PM Mayrhofer, X He, M Gillinger, Z Ye, X Wang, A Bittner, ...
Applied Physics Letters 105 (13), 133502, 2014
The porosification of fired LTCC substrates by applying a wet chemical etching procedure
A Bittner, U Schmid
Journal of the European Ceramic Society 29 (1), 99-104, 2009
Impact of the surface-near silicon substrate properties on the microstructure of sputter-deposited AlN thin films
M Schneider, A Bittner, F Patocka, M Stöger-Pollach, E Halwax, U Schmid
Applied Physics Letters 101 (22), 221602, 2012
c-axis orientation and piezoelectric coefficients of AlN thin films sputter-deposited on titanium bottom electrodes
A Ababneh, M Alsumady, H Seidel, T Manzaneque, J Hernando-García, ...
Applied surface science 259, 59-65, 2012
Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminum-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes
M Kucera, E Wistrela, G Pfusterschmied, V Ruiz-Díez, T Manzaneque, ...
Applied Physics Letters 104 (23), 233501, 2014
Circular test structure for the determination of piezoelectric constants of ScxAl1− xN thin films applying Laser Doppler Vibrometry and FEM simulations
PM Mayrhofer, H Euchner, A Bittner, U Schmid
Sensors and actuators A: Physical 222, 301-308, 2015
The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films
PM Mayrhofer, C Eisenmenger-Sittner, M Stöger-Pollach, H Euchner, ...
Journal of Applied Physics 115 (19), 193505, 2014
Q-factor enhancement for self-actuated self-sensing piezoelectric MEMS resonators applying a lock-in driven feedback loop
M Kucera, T Manzaneque, JL Sánchez-Rojas, A Bittner, U Schmid
Journal of Micromechanics and Microengineering 23 (8), 085009, 2013
Arrays of open, independently tunable microcavities
C Derntl, M Schneider, J Schalko, A Bittner, J Schmiedmayer, U Schmid, ...
Optics express 22 (18), 22111-22120, 2014
Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates
A Bittner, A Ababneh, H Seidel, U Schmid
Applied surface science 257 (3), 1088-1091, 2010
Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators
M Kucera, F Hofbauer, E Wistrela, T Manzaneque, V Ruiz-Díez, ...
Microsystem technologies 20 (4-5), 615-625, 2014
Fundamental properties of a-SiNx: H thin films deposited by ICP-PECVD for MEMS applications
D Dergez, J Schalko, A Bittner, U Schmid
Applied surface science 284, 348-353, 2013
Design, fabrication and testing of a piezoelectric energy microgenerator
ABA Dow, A Bittner, U Schmid, NP Kherani
Microsystem technologies 20 (4-5), 1035-1040, 2014
Modeling the performance of a micromachined piezoelectric energy harvester
ABA Dow, M Schneider, D Koo, HA Al-Rubaye, A Bittner, U Schmid, ...
Microsystem technologies 18 (7-8), 1035-1043, 2012
Electromigration resistance and long term stability of textured silver thin films on LTCC
A Bittner, H Seidel, U Schmid
Microelectronic engineering 88 (1), 127-130, 2011
Thickness dependence of Young's modulus and residual stress of sputtered aluminum nitride thin films
M Schneider, A Bittner, U Schmid
Applied Physics Letters 105 (20), 201912, 2014
High‐Frequency Characterization of Porous Low‐Temperature Cofired Ceramics Substrates
A Bittner, H Seidel, U Schmid
Journal of the American Ceramic Society 93 (11), 3778-3781, 2010
A permittivity characterization method by detuned ring-resonators for bulk materials up to 110 GHz
A Talai, F Steinhäußer, A Bittner, U Schmid, R Weigel, A Koelpin
2014 44th European Microwave Conference, 124-127, 2014
Ultrananocrystalline diamond-based high-velocity SAW device fabricated by electron beam lithography
ABA Dow, H Lin, M Schneider, C Petkov, A Bittner, A Ahmed, C Popov, ...
IEEE transactions on nanotechnology 11 (5), 979-984, 2012
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