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Matej Hala
Matej Hala
AVANCIS GmbH
Verified email at posteo.net - Homepage
Title
Cited by
Cited by
Year
The ‘recycling trap’: a generalized explanation of discharge runaway in high-power impulse magnetron sputtering
A Anders, J Čapek, M Hála, L Martinu
Journal of physics D: Applied physics 45 (1), 012003, 2011
1072011
Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies
M Hála, J Čapek, O Zabeida, JE Klemberg-Sapieha, L Martinu
Journal of Physics D: Applied Physics 45 (5), 055204, 2012
952012
Deposition rate enhancement in HiPIMS without compromising the ionized fraction of the deposition flux
J Čapek, M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu
Journal of Physics D: Applied Physics 46 (20), 205205, 2013
922013
Dynamics of reactive high-power impulse magnetron sputtering discharge studied by time-and space-resolved optical emission spectroscopy and fast imaging
M Hala, N Viau, O Zabeida, JE Klemberg-Sapieha, L Martinu
Journal of Applied Physics 107 (4), 2010
922010
Ordering kesterite improves solar cells: A low temperature post-deposition annealing study
G Rey, TP Weiss, J Sendler, A Finger, C Spindler, F Werner, M Melchiorre, ...
Solar Energy Materials and Solar Cells 151, 131-138, 2016
802016
Reactive HiPIMS deposition of SiO2/Ta2O5 optical interference filters
M Hála, R Vernhes, O Zabeida, JE Klemberg-Sapieha, L Martinu
Journal of Applied Physics 116 (21), 2014
482014
Steady state discharge optimization in high-power impulse magnetron sputtering through the control of the magnetic field
J Čapek, M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu
Journal of Applied Physics 111 (2), 2012
462012
Pulse management in high power pulsed magnetron sputtering of niobium
M Hála, J Čapek, O Zabeida, JE Klemberg-Sapieha, L Martinu
Surface and Coatings Technology 206 (19-20), 4186-4193, 2012
402012
Highly conductive ZnO films with high near infrared transparency
M Hála, S Fujii, A Redinger, Y Inoue, G Rey, M Thevenin, V Deprédurand, ...
Progress in Photovoltaics: Research and Applications 23 (11), 1630-1641, 2015
292015
Improved environmental stability of highly conductive nominally undoped ZnO layers suitable for n-type windows in thin film solar cells
M Hala, H Kato, M Algasinger, Y Inoue, G Rey, F Werner, C Schubbert, ...
Solar Energy Materials and Solar Cells 161, 232-239, 2017
282017
Growth and properties of high index Ta2O5 optical coatings prepared by HiPIMS and other methods
M Hála, R Vernhes, O Zabeida, E Bousser, JE Klemberg-Sapieha, ...
Surface and Coatings Technology 241, 33-37, 2014
252014
Time-and species-resolved plasma imaging as a new diagnostic approach for HiPIMS discharge characterization
M Hala, O Zabeida, B Baloukas, JE Klemberg-Sapieha, L Martinu
IEEE Transactions on plasma science 38 (11), 3035-3039, 2010
212010
Optimization of buffer layer/i-layer band alignment
Y Inoue, M Hála, A Steigert, R Klenk, S Siebentritt
2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC), 1-5, 2015
162015
Dynamics of HiPIMS discharge operated in oxygen
M Hála, O Zabeida, JE Klemberg-Sapieha, L Martinu
IEEE Transactions on plasma science 39 (11), 2582-2583, 2011
92011
Klemberg-Sapieha JE and Martinu L
M Hála, R Vernhes, O Zabeida
J. Appl. Phys. 2014, 116, 2014
62014
Characterization of high power impulse magnetron sputtering discharges
M Hala
Ph. D. Thesis, 2011
42011
Time-and space-resolved optical emission spectroscopy study of reactive HIPIMS discharges
M Hala, N Viau, O Zabeida, JE Klemberg-Sapieha, L Martinu
52nd Annual Technical Conference, 2009
22009
Environmental stability of highly conductive nominally undoped ZnO layers
M Hála, Y Inoue, H Kato, G Rey, F Werner, C Schubbert, M Algasinger, ...
2016 IEEE 43rd Photovoltaic Specialists Conference (PVSC), 1464-1468, 2016
12016
Passive and active optical coatings prepared by HiPIMS
M Hala, R Vernhes, JP Fortier, B Baloukas, O Zabeida, ...
Optical Interference Coatings, WC. 8, 2013
12013
Beyond 20% World Record Efficiency for Thin-Film Solar Modules
H Elanzeery, M Stölzel, P Eraerds, P Borowski, H Aboulfadl, A Lomuscio, ...
IEEE Journal of Photovoltaics, 2023
2023
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